EUV optics

We provide high quality EUV (extreme ultraviolet) / X-ray focusing mirrors. We have many examples of multi-layer and single-layer mirrors.

We provide high-precision toroidal mirrors for EUV, VUV, and soft X-ray regions. Please see production examples and design examples.

We offer dichroic mirrors that separate EUV light from visible light and near-infrared light.

We provide EUV beam splitters with arbitrary transmittance and reflectance. By using an EUV beam splitter, which is also called an EUV half mirror, EUV light can be split into transmissive and reflective components in the same way as visible light and ultraviolet light.

We offer stencil structure gratings for VUV, EUV, and soft X-ray regions. In addition to standard products, we can also provide custom-made products.

We offer lenses that can focus ultraviolet light with a long focal point.

We provide reflective polarizers for the EUV region and soft X-ray region. Please see design examples.