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EUV beam splitter

We provide EUV beam splitters with arbitrary transmittance and reflectance.

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ビームスプリッタ画像:window size: 10mm x 10mm
Exterior photo of EUV beam splitter
By using an EUV beam splitter, which is also called an EUV half mirror, EUV light can be split into transmissive and reflective components in the same way as visible light and ultraviolet light. This optical element, which consists of a free-standing Mo/Si multilayer film, is used in the construction of interferometers and as a beam monitor. Upon request, we can customize the transmission/transmission ratio, incident angle, etc. in the 13.5 nm wavelength region.

design example

Wavelength 13.5 nm, reflection/transmission characteristics of beam splitter for s-polarized light

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Incident angle 45 degrees, 1:1 split
 
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Incident angle 45 degrees, high transmittance
 
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Incident angle 45 degrees, high reflectance
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Incident angle 6 degrees, 1:1 split

Standard specifications

We will customize the transmission/reflection ratio, incident angle, center wavelength, and size according to your request. We also offer it mounted in a metal holder.

  Standard specifications
Beam splitter part 7 x 7 mm, free-standing Mo/Si multilayer
frame part 14 mm x 14 mm, 0.5 mm thick Si substrate
Angle of incidence 45 degrees, 6 degrees
central wavelength 13.5 nm
Reflection/transmission characteristics 1:1, high reflection, high transmission

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Please feel free to contact us for inquiries such as an estimate.

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