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Exterior photo of EUV beam splitter
By using an EUV beam splitter, which is also called an EUV half mirror, EUV light can be split into transmissive and reflective components in the same way as visible light and ultraviolet light. This optical element, which consists of a free-standing Mo/Si multilayer film, is used in the construction of interferometers and as a beam monitor. Upon request, we can customize the transmission/transmission ratio, incident angle, etc. in the 13.5 nm wavelength region.
design example
Wavelength 13.5 nm, reflection/transmission characteristics of beam splitter for s-polarized light
Incident angle 45 degrees, 1:1 split
Incident angle 45 degrees, high transmittance
Incident angle 45 degrees, high reflectance
Incident angle 6 degrees, 1:1 split
Standard specifications
We will customize the transmission/reflection ratio, incident angle, center wavelength, and size according to your request. We also offer it mounted in a metal holder.
| Standard specifications | |
|---|---|
| Beam splitter part | 7 x 7 mm, free-standing Mo/Si multilayer |
| frame part | 14 mm x 14 mm, 0.5 mm thick Si substrate |
| Angle of incidence | 45 degrees, 6 degrees |
| central wavelength | 13.5 nm |
| Reflection/transmission characteristics | 1:1, high reflection, high transmission |
Please contact us
Please feel free to contact us for inquiries such as an estimate.
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