Length measuring scale

• Ideal for length and angle calibration of scanning probe microscopes, etc. essential for fine pattern evaluation
• Low price and short delivery time

* We also accept special orders for ultra-fine patterns with a pitch of 100 nm or less.

Features/Specifications

	Vertical type (AS100P-D)	Inclined type (AS200P-A)
Usage	Length calibration, probe shape evaluation	angle calibration
Feature	Since anisotropic etching is used on a Si (110) substrate, the pattern shape is vertical and accurate. Accurate probe shape measurement is possible due to high degree of orthogonality	Since anisotropic etching is used on a Si (100) substrate, the pattern tilt angle is accurate at 54.7 degrees. Accurate tilt angle of 54.7 degrees, ideal for equipment reproducibility confirmation
angle of inclination	90 degree	54.74 degrees
Pattern type	1:1 L&S (concave outside the pattern area)	400 nm L&S 400 nm grid 200 nm L&S 100 nmL&S or more 4 types
Line (convex) width	50-250nm	100-400 nm
pattern depth	125nm±20%	100-200 nm (off-the-shelf)
pattern area	200μm×200μm	184μm×184μm×4 (seed)
substrate	Si 10mm×10mm×0.525mmt	Si 10mm×10mm×0.525mmt

*We offer low prices and short delivery times. Please feel free to contact us.

Vertical type (AS100P-D)

Inclined type (AS200P-A)

AFM observation image(unit: horizontal direction: μm, vertical direction: nm)

Custom order example

TEM image