It is a multilayer film standard sample used for depth direction resolution evaluation, distance measurement, and sensitivity evaluation such as SIMS, AES, XPS, and XRF analysis.
We will provide a standard sample of your desired material combination, film thickness, and number of layers.
Production example
Si/BN multilayer film sample
- This is a laminated film sample used for depth direction analysis such as SIMS analysis.
- In addition to periodic multi-layer film samples, we also support non-periodic multi-layer film samples.
- It is also possible to form an ultra-thin BN layer (~0.01 nm).
Example of cross-sectional structure evaluation by TEM
Si/BN multilayer structure schematic diagram
Example of SIMS depth profile analysis
Example of surface roughness measurement by AFM
Si/Mo multilayer film sample
Si/Mo multilayer film sample
Schematic diagram of Si/Mo multilayer structure
AES measurement
AES analysis evaluation example
Various laminated samples
- We can handle laminated films of various materials.
- The figure below is an example of a sample in which four different types of materials are laminated.
Cross-sectional structure evaluation example and schematic diagram by TEM
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