It is a multilayer film standard sample used for depth direction resolution evaluation, distance measurement, and sensitivity evaluation such as SIMS, AES, XPS, and XRF analysis.
We will provide a standard sample of your desired material combination, film thickness, and number of layers.
Production example
Si/BN multilayer film sample
- This is a laminated film sample used for depth direction analysis such as SIMS analysis.
- In addition to periodic multi-layer film samples, we also support non-periodic multi-layer film samples.
- It is also possible to form an ultra-thin BN layer (~0.01 nm).
![Example of cross-sectional structure evaluation by TEM](https://keytech.ntt-at.co.jp/nano/images/p3003.jpg)
Example of cross-sectional structure evaluation by TEM
![Si/BN multilayer structure schematic diagram](https://keytech.ntt-at.co.jp/nano/images/p3003.gif)
Si/BN multilayer structure schematic diagram
![Example of SIMS depth profile analysis](https://keytech.ntt-at.co.jp/nano/images/p3003_1.jpg)
Example of SIMS depth profile analysis
![Example of surface roughness measurement by AFM](https://keytech.ntt-at.co.jp/nano/images/p3003_2.jpg)
Example of surface roughness measurement by AFM
Si/Mo multilayer film sample
![Si/Mo multilayer film sample](https://keytech.ntt-at.co.jp/nano/images/p3003_3.jpg)
Si/Mo multilayer film sample
![Schematic diagram of Si/Mo multilayer structure](https://wovn.global.ssl.fastly.net/ImageValue/production/624d32c0205c3e139a304018/en/624d32c0205c3e139a304018.img.1709533749010.jpg)
Schematic diagram of Si/Mo multilayer structure
![AES measurement](https://wovn.global.ssl.fastly.net/ImageValue/production/624d32c0205c3e139a304018/en/624d32c0205c3e139a304018.img.1709533773572.jpg)
AES measurement
![AES analysis evaluation example](https://wovn.global.ssl.fastly.net/ImageValue/production/624d32c0205c3e139a304018/en/624d32c0205c3e139a304018.img.1709533760990.jpg)
AES analysis evaluation example
Various laminated samples
- We can handle laminated films of various materials.
- The figure below is an example of a sample in which four different types of materials are laminated.
![Cross-sectional structure evaluation example and schematic diagram by TEM](https://keytech.ntt-at.co.jp/nano/images/p3003_5.jpg)
![Cross-sectional structure evaluation example and schematic diagram by TEM](https://wovn.global.ssl.fastly.net/ImageValue/production/624d32c0205c3e139a304018/en/624d32c0205c3e139a304018.img.1709533782005.jpg)
Cross-sectional structure evaluation example and schematic diagram by TEM