EUV/X-ray optical parts

We provide unprecedented spectroscopy and photodetection solutions such as high-efficiency, broadband flat-field spectrometers in the VUV, EUV, and soft X-ray regions, XAFS equipment, and compact X-ray CCD cameras.

We design and manufacture optical systems for focusing and imaging extreme ultraviolet (EUV) and X-rays. Please see the production example.

We offer high quality EUV (extreme ultraviolet) / X-ray collector mirrors. We introduce many production examples.

We provide high-precision toroidal mirrors for EUV, VUV, and soft X-ray regions. Please see production examples and design examples.

We offer dichroic mirrors that separate EUV light from visible light and near-infrared light.

We provide EUV beam splitters with arbitrary transmittance and reflectance. By using an EUV beam splitter, which is also called an EUV half mirror, EUV light can be split into transmissive and reflective components in the same way as visible light and ultraviolet light.

We offer stencil structure gratings for VUV, EUV, and soft X-ray regions. In addition to standard products, we can also provide custom-made products.

We offer lenses that can focus ultraviolet light with a long focal point.

We provide reflective polarizers for the EUV region and soft X-ray region. Please see design examples.

High resolution chart for X-ray microscope. NTT-AT 's X-ray charts are used for resolution evaluation at synchrotron radiation facilities around the world. We also offer reflective charts for the EUV region.

We offer highly irradiation resistant X-ray Fresnel zone plates made of SiC membrane and Ta absorber. Production examples are posted.

We provide multi-layer mirrors and single-layer mirrors for hard X-rays. Production examples and design examples are posted.

SiN, SiC membrane and ultra-thin precious metal structure that transmit soft X-rays. The metal film can be selected according to the detected X-rays from the observation sample.

For those looking for a manufacturing partner in X-ray optics research! Here is an example of NTT-AT 's development of X-ray optical components.

We have compiled papers related to EUV/X-ray optical components such as EUV mirrors and X-ray charts.