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X-ray Fresnel zone plate

We offer highly irradiation resistant X-ray Fresnel zone plates made of SiC membrane and Ta absorber.

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Feature

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Fresnel zone plate SEM image
In the X-ray region, where the refractive index of the material is approximately equal to 1, unlike visible light, it is not possible to focus the light with a convex lens, so a Fresnel zone plate (FZP) is used as a focusing element.
NTT-AT 's FZP uses a Ta pattern with high verticality as an absorbing material and a SiC membrane with high X-ray irradiation resistance as a holding material, and is widely used in synchrotron radiation facilities.

Production example

Production example image
Ultra-fine FZP: diameter 250 µm, Ta film thickness 200 nm, outermost zone width 50 nm, SiC membrane thickness 2.0 µm
Production example image
Production example image

High aspect FZP: diameter 100 µm, Ta film thickness 2 µm, outermost zone width 200 nm, SiN membrane thickness 2.0 µm

Typical specifications

We will design according to your requested energy, focal length, resolution, etc.

  Typical specifications
Minimum outermost zone width and aspect ratio 50 nm (aspect ratio 4), 200 nm (aspect ratio 10)
maximum diameter 2 mm
membrane material SiC or SiN, 0.2 µm - 2 µm
absorber material Ta, 0.1 µm - 2.0 µm
Si frame external dimensions 10 mm x 10 mm x 1 mm thickness
Structural drawing
(a) X-ray FZP section (b) SiC or SiN membrane (c) Si substrate (d) Ta absorber
 

Optional parts

photograph
center beam stop
Absorber: Au, 30 µm thick, membrane: SiC
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Pinhole
Material: Pt, 100 µm thick, pinhole diameter: 50 um

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Please feel free to contact us for inquiries such as an estimate.

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