Feature
Fresnel zone plate SEM image
In the X-ray region, where the refractive index of the material is approximately equal to 1, unlike visible light, it is not possible to focus the light with a convex lens, so a Fresnel zone plate (FZP) is used as a focusing element.
NTT-AT 's FZP uses a Ta pattern with high verticality as an absorbing material and a SiC membrane with high X-ray irradiation resistance as a holding material, and is widely used in synchrotron radiation facilities.
NTT-AT 's FZP uses a Ta pattern with high verticality as an absorbing material and a SiC membrane with high X-ray irradiation resistance as a holding material, and is widely used in synchrotron radiation facilities.
Production example
Ultra-fine FZP: diameter 250 µm, Ta film thickness 200 nm, outermost zone width 50 nm, SiC membrane thickness 2.0 µm
High aspect FZP: diameter 100 µm, Ta film thickness 2 µm, outermost zone width 200 nm, SiN membrane thickness 2.0 µm
Typical specifications
We will design according to your requested energy, focal length, resolution, etc.
| Typical specifications | |
|---|---|
| Minimum outermost zone width and aspect ratio | 50 nm (aspect ratio 4), 200 nm (aspect ratio 10) |
| maximum diameter | 2 mm |
| membrane material | SiC or SiN, 0.2 µm - 2 µm |
| absorber material | Ta, 0.1 µm - 2.0 µm |
| Si frame external dimensions | 10 mm x 10 mm x 1 mm thickness |
(a) X-ray FZP section (b) SiC or SiN membrane (c) Si substrate (d) Ta absorber
Optional parts
center beam stop
Absorber: Au, 30 µm thick, membrane: SiC
Absorber: Au, 30 µm thick, membrane: SiC
Pinhole
Material: Pt, 100 µm thick, pinhole diameter: 50 um
Material: Pt, 100 µm thick, pinhole diameter: 50 um
Please contact us
Please feel free to contact us for inquiries such as an estimate.
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