Home > EUV optics, X-ray optics > X-ray optical components > X-ray diffraction gratings

X-ray diffraction grating

Phase gratings and absorption gratings for X-ray Talbot imaging with low sidewall roughness and excellent X-ray radiation resistance.

Contact us
グレーティングパターンの画像

Feature

NTT-AT 's phase gratings and absorption gratings for X-ray Talbot imaging are manufactured based on high aspect ratio Si etching technology and Au plating technology, and achieve sufficiently high X-ray radiation resistance compared to conventional photoresist gratings. In addition, they reduce the deterioration of the measurement environment due to debris generation.
  • Phase grating: Si structure with low roughness and high perpendicularity
  • Absorption grating: Au-plated absorber embedded in a Si structure with low roughness and high verticality

Standard product specifications

  Absorption grating Phase Grating
material Absorption part: Au, transmission part: Si Phase modulation section: Si
membrane Silicon, thickness 50 μm Silicon, thickness 50 μm
Pitch/Height 3 μm / 10 μm 2 μm / 20 μm
Maximum Area 10mm square 40mm square
*Products can be customized.

Please contact us

Please feel free to contact us for inquiries such as an estimate.

Contact us

Product Line

close up

Service list

close up

List of proposals for problem solving

close up

Catalog list

close up