Feature
EUV dichroic mirror
In order to efficiently utilize the EUV light generated by high-order harmonic generation, it is necessary to separate the high-intensity pump light propagating coaxially with the EUV light.
NTT-AT 's EUV dichroic mirror reflects broadband EUV light and prevents reflection of visible or near-infrared pump light with a high damage threshold compared to thin film filters and Brewster's angle beam separators. .
In addition to standard products for 800 nm anti-reflection, we also offer custom products based on desired wavelength, mirror size, and angle of incidence. We also offer double-sided coated products for beam coupling.
NTT-AT 's EUV dichroic mirror reflects broadband EUV light and prevents reflection of visible or near-infrared pump light with a high damage threshold compared to thin film filters and Brewster's angle beam separators. .
In addition to standard products for 800 nm anti-reflection, we also offer custom products based on desired wavelength, mirror size, and angle of incidence. We also offer double-sided coated products for beam coupling.
Standard goods
DM20/800-2002 EUV reflection profile
Reflection profile of DM30/800-2002
Standard product specifications are as follows.
| DM-20/800-2002 | DM-30/800-2002 | |
|---|---|---|
| oblique angle | 12 degrees | |
| Polarization | p-polarized | |
| Anti-reflection | <2% @ 800nm +/- 50nm | |
| EUV reflectance | 60% @ 20nm | 40% @ 30nm |
| Substrate type |
quartz
|
|
| size | 50.8 mm diameter, 5.08 mm thick | |
| back side | sand finish | |
Example of custom-made product design
Dichroic mirror for wavelength 3 nm (oblique incidence angle 3 degrees). Anti-reflection: <30% @1.5 μm.
We will design the coating according to your request.
| Typical custom-made specifications | |
|---|---|
| Maximum substrate length | 300mm |
|
High reflection band
|
3nm - 120nm |
| antireflection wavelength | 400nm, 800nm, 1030nm, 1.5μm |
| Polarization |
s-polarized, p-polarized
|
| back side | coated, sand finish |
Download materials
| High Contrast and High Damage threshold EUV/Visible Dichroic Mirror (English, white paper) | 348KB | download |
|---|
Please contact us
Please feel free to contact us for inquiries such as an estimate.
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