- We have made it possible to measure the fine beam sizes of electron beams, ion beams, and X-rays.
- nm units.Beam width can be measured in
- For 1D and 2D measurementare available.
(a) Scale structure and
(b) Transmitted electron beam intensity
(b) Transmitted electron beam intensity
Example of measuring electron beam size
References:
K.Kurihara,K.Iwadate,H.Namatsu,
M.Nagase,H.Takenaka and K.Murase,
"An Electron Beam Nanolithography System and its Application to Si Nanofabrication",
Jpn.J.Appl.Phys.,34（1995）6940
K.Kurihara,K.Iwadate,H.Namatsu,
M.Nagase,H.Takenaka and K.Murase,
"An Electron Beam Nanolithography System and its Application to Si Nanofabrication",
Jpn.J.Appl.Phys.,34（1995）6940
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