Because it is an ultraviolet curable resin, it is possible to fabricate waveguides by various methods.
- direct exposure method
- RIE method
- Stamper method
Feature
- 屈折率を0.001単位で指定可能
- excellent light transmission
- Viscosity can be adjusted, and film thickness controllability during spin coating is good.
- Refractive index can be controlled in the range of 1.43 to 1.62 with an accuracy of ±0.005
[Example of application] Cladding of optical waveguide
It has excellent flatness and refractive index matching, and is also available in a solder heat resistant grade, so it can also be applied to interlayer insulating films.
![Example of waveguide fabrication by direct exposure method](https://keytech.ntt-at.co.jp/adhesive/images/p1001g_5_1.jpg)
Example of waveguide fabrication by direct exposure method
![Fabrication example of multistage waveguide](https://keytech.ntt-at.co.jp/adhesive/images/p1001g_6_3.jpg)
Fabrication example of multistage waveguide
(Epoxy resin is used for clad/MM waveguide core)
(Epoxy resin is used for clad/MM waveguide core)
平坦性に優れるため、多段の導波路作成�にも適しています
Specification
Core/cladding material set (*1)
Principal component | Refractive index @ 830nm | Feature |
---|---|---|
epoxy |
Core: 1.53±0.005
Cladding: 1.51±0.005 |
Core: Viscosity=2,200mPas Tg=222℃ Δn=1.3% (@830nm) Clad: Viscosity=2,900mPas Tg=200℃ |
Refractive index adjustment type
Principal component | Refractive index adjustment range | Feature |
---|---|---|
epoxy | nD=1.43~1.62 |
Adjustable viscosity (It is easy to control the film thickness of spin coating.) |