EUV single layer film mirror design example

Au mirror

Ni mirror

Rumirror

SiC mirror

B₄C mirror

Standard product specifications

Standard model	EUVSM-(a)-(b)(c)
(a) Coating material	Au, Ni, Ru, B4C, SiC
(b) Substrate size	1025: 1 inch diameter x 0.25 inch thick 0525: 0.5" diameter x 0.25" thick
(c) Substrate type	F: flat, C: concave (curvature radius 100 mm - 3000 mm)

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